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A buffer function has been implemented in the Alaina, allowing for wafer replacement.
The sorter system complies with SEMI Standards (E15.1-0600, E57-0600, E62-0999, E63-0600, E64-0600). It features a buffer function in the aligner, enabling wafer exchange and achieving high throughput. With the built-in ID reader, it is possible to read the wafer ID (front and back support is optional). For more details, please contact us or refer to the catalog.
Equipped with a multi-axis GCR and a glass-compatible aligner SAL3361GR inside the device.
The 6-inch sorter system reduces the width direction to 50% of the inline type by arranging two cassettes in two tiers (a total of four). It is equipped with a multi-axis GCR and a glass-compatible aligner SAL3361GR. By incorporating the multi-axis GCR type, parallel arrangement of cassettes can be achieved solely by the robot. The glass-compatible aligner can position transparent, translucent, and silicone materials for centering and oleo-fluorolocation quickly and with high precision. For more details, please contact us or refer to the catalog.
